KL7023 - Smart Microsystems

You will be presented with theoretical background that leads to microsystems. You will study the concepts of transduction mechanisms and their integration into microstructures. The theoretical materials will be supplemented with computer-based modelling and analysis work exploring applications of microsystems especially in sensors and actuators.

Lectures and tutorials are provided to the students with the background information. The students will be guided towards a project where they can apply the knowledge gained in this module. To steer the right direction and complete the project successfully, the students will receive feedback from the module tutor.

All modules at Northumbria include a range of reading materials that students are expected to engage with. The reading list for this module can be found at: http://readinglists.northumbria.ac.uk
(Reading List service online guide for academic staff this containing contact details for the Reading List team – http://library.northumbria.ac.uk/readinglists)

Knowledge & Understanding:
• Demonstrate the application of knowledge and develop practical skills in microsystems.

Intellectual / Professional skills & abilities:
• Apply existing and newly acquired knowledge of mathematics and engineering principles to microsystems (M1)
• Computer-based modelling approaches to design and analyse microsystem-based sensors and actuators (M3)
• Design and validate a microsystem-based device (M6)

Personal Values Attributes (Global / Cultural awareness, Ethics, Curiosity) (PVA):
• Maintain and develop a professional engineering attitude.
• Develop an awareness of safety in the experimental environment;
• Show respect and tolerance for others in the group

The assessment consists of three sections:

1. coursework (CW): Individual reflective report (weighting 60%) (2000 Words limits)

This report should reflect the the students’ understanding of basic concepts in microsystems.



2. Presentation (PRE): Group Oral Presentation (weighting 40%)

This 20-min presentation should include the technical aspects of the assigned design exercise.

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This module provides a background in microengineering in general and Micro Electro Mechanical Systems (MEMS) in particular. This module will build on the skills acquired through previous study and gain some new knowledge to extend the experience of the students into the following areas:

• Micromachining and microfabrication techniques,
• Thin-film processes, photolithography, deposition and etching techniques for microsystems fabrication,
• Analytical and finite-element method-based analysis of microsystems,
• Transduction mechanisms,
• Design and analysis of micromachined sensors and actuators.

You will be presented with theoretical background that leads to microsystems. You will study the concepts of transduction mechanisms and their integration into microstructures. The theoretical materials will be supplemented with computer-based modelling and analysis work exploring applications of microsystems especially in sensors and actuators.